Two membrane passes
Successive RO stages reduce the dissolved load before the silicon-process water reaches EDI.
Cleanroom Pure Water Systems
| Brand | ST |
|---|---|
| Public model series | ST-LPW44 |
| Primary process | double-pass RO + EDI + polishing mixed bed |
| Final water quality | 18.2 MΩ·cm at the point of use |
| Pretreatment | Media filtration, activated carbon, softening and precision filtration |
| Control | Automatic control with tank-level and pump-pressure protection |
| Online monitoring | Product-water quality |
Customization availableSpecifications can be customized to your requirements.
Specify the quantity and configuration in your inquiry.
Polycrystalline Silicon Ultrapure Water System – ST-LPW44 Series combines double-pass RO, EDI and final polishing for semiconductor process-water duties. The additional RO pass reduces the dissolved load entering the downstream stages, helping organize bulk treatment and final polishing as separate steps.
The point-of-use requirement is central to the layout: treatment near the plant does not replace control of storage and the distribution route to the cleaning tool. Final quality is matched to the actual process rather than inferred from the word semiconductor.
FEATURES AND BENEFITS
Successive RO stages reduce the dissolved load before the silicon-process water reaches EDI.
Additional membrane capacity can be planned where silicon-washing demand grows.
The control arrangement stops operation on a fault, supporting a managed response before production resumes.
APPLICATION ENVIRONMENTS
Supplies controlled water for silicon material and wafer washing.
Supports compatible material, component and tooling rinses where dissolved ions can affect yield.
Provides the selected grade for final rinsing where residues, particles or ionic background must be limited.
SELECTION GUIDANCE
Size production around silicon-washing batches and the time available between them. Leave access to the membrane and EDI stages and their cleaning connections so service can be planned around production.
PROCUREMENT / INQUIRY
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