FFU と HEPA ろ過 ： 安定したクリーンルーム空気流の構築

A fan filter unit combines a fan, a high-efficiency filter and a ceiling supply module in one compact assembly. Installed in a cleanroom ceiling grid, FFUs can provide distributed filtered air close to the controlled space and allow airflow capacity to be arranged around the process below.

Why distributed filtration is useful

Cleanroom performance depends on more than filter efficiency. Air volume, supply location, return paths, heat load, equipment layout and room pressure must work together. A distributed FFU layout gives designers flexibility to concentrate clean air above critical areas while maintaining broader room circulation.

What an FFU contributes

The fan overcomes resistance through the filter and diffuser, while the filter captures airborne particles before supply air enters the room. Individual or grouped controls can support airflow adjustment and operational zoning. The final layout should be engineered with the return-air path so that clean supply air does not short-circuit or leave poorly swept areas.

Important coordination details

• Ceiling module dimensions and weight must match the support grid.
• Airflow and external static pressure should be selected for the room design rather than assumed from a catalogue maximum.
• Motor type, control method, monitoring interface and power distribution need early coordination.
• Filter replacement direction and access space must fit the maintenance strategy.
• Diffuser style should support the required airflow pattern above the process.

Problems a coordinated FFU system helps solve

A correctly selected system can reduce uneven supply, simplify local airflow adjustment and make future module replacement more manageable. It can also support phased cleanroom layouts where the number or location of high-cleanliness work zones may change.

Information to prepare before selection

Provide the room dimensions, target environment, ceiling grid, heat load, process layout, return-air arrangement, available power, control preference and maintenance access direction. Final filter grade, airflow and quantity should be confirmed as part of the full room design.

Browse FFU and terminal air purification equipment, or submit your cleanroom airflow list for coordinated selection.